Numerical characterization and experimental verification of an in-plane MEMS-actuator with thin-film aluminum heater

Peter Meszmer, Karla Hiller, Steffen Hartmann, Alexey Shaporin, Daniel May, Raul David Rodriguez, Jörg Arnold, Gianina Schondelmaier, Jan Mehner, Dietrich R. T. Zahn, Bernhard Wunderle
  • Microsystem Technologies, April 2014, Springer Science + Business Media
  • DOI: 10.1007/s00542-014-2143-6

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The following have contributed to this page: Professor Dietrich RT Zahn