A high sensitive MEMS capacitive fingerprint sensor using slotted membrane

  • Bahram Azizollah Ganji, Mojtaba Shams Nateri
  • Microsystem Technologies, August 2012, Springer Science + Business Media
  • DOI: 10.1007/s00542-012-1647-1

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http://dx.doi.org/10.1007/s00542-012-1647-1