Application of piezoelectric layers in electrostatic MEM actuators: controlling of pull-in voltage

  • Ghader Rezazadeh, Ahmadali Tahmasebi, Mikhail Zubstov
  • Microsystem Technologies, August 2006, Springer Science + Business Media
  • DOI: 10.1007/s00542-006-0245-5

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http://dx.doi.org/10.1007/s00542-006-0245-5