Direct removal of SU-8 using focused laser writing

F.C. Cheong, B. Varghese, S. Sindhu, C.M. Liu, S. Valiyaveettil, A.A. Bettiol, J.A. van Kan, F. Watt, W.S. Chin, C.T. Lim, C.H. Sow
  • Applied Physics, January 2007, Springer Science + Business Media
  • DOI: 10.1007/s00339-006-3846-z
The author haven't finished explaining this publicationThe author haven't finished explaining this publication

The following have contributed to this page: Professor Suresh Valiyaveettil