Microfocussed Ion Beams for Surface Analysis and Depth Profiling

  • M. Preuss, D. Kingham
  • January 1985, Springer Science + Business Media
  • DOI: 10.1007/978-3-7091-8840-8_5

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http://dx.doi.org/10.1007/978-3-7091-8840-8_5