Design and Fabrication of a Miniaturized Three-Degree-of-Freedom Piezoresistive Acceleration Sensor Based on MEMS Technology Using Deep Reactive Ion Etching

  • Vu Ngoc Hung, Nguyen Van Minh, Le Van Minh, Nguyen Huu Hung, Dzung Viet Dao, Chu Manh Hoang, Ranjith Amarasinghe, Bui Thanh Tung, Susumu Sugiyama
  • Springer Science + Business Media
  • DOI: 10.1007/978-3-540-88201-5_44

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http://dx.doi.org/10.1007/978-3-540-88201-5_44