Influence of ion mixing, ion beam-induced roughness and temperature on the depth resolution of sputter depth profiling of metallic bilayer interfaces

  • Eun-Hee Cirlin, Yang-Tse Cheng, Philip Ireland, Bruce Clemens
  • Surface and Interface Analysis, May 1990, Wiley
  • DOI: 10.1002/sia.740150507

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http://dx.doi.org/10.1002/sia.740150507

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