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Polarization effects in laser 3D nanolithography are employed to fine-tune the feature sizes in the structuring of photoresist. The vectorial Debye theory is used for modelling and a variation of up to ≈20% in the line width of SZ2080 is shown experimentally for the identical axial extent. This proves polarization to be a variable parameter for voxel-aspect ratio control.
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3D Polymerization via Polarization Control on Nanoscale
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This page is a summary of: Nanoscale Precision of 3D Polymerization via Polarization Control, Advanced Optical Materials, May 2016, Wiley,
DOI: 10.1002/adom.201600155.
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