OVPD und Anwendung optischer Spektroskopiemethoden zur WachstumskontrolleOVPD and Applications of Optical Spectroscopic Methods to Growth Control

D.R.T. Zahn, C. Himcinschi, M. Friedrich, A. Paraian, M. Heuken
  • Vakuum in Forschung und Praxis, December 2003, Wiley
  • DOI: 10.1002/vipr.200300197
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http://dx.doi.org/10.1002/vipr.200300197

The following have contributed to this page: Professor Dietrich RT Zahn