Development of nano-roughness under SIMS ion sputtering of germanium surfaces

  • Nano-roughness under SIMS sputtering on germanium surfaces
  • E. Iacob, E. Demenev, D. Giubertoni, M. Barozzi, S. Gennaro, M. Bersani
  • Surface and Interface Analysis, April 2012, Wiley
  • DOI: 10.1002/sia.4997

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http://dx.doi.org/10.1002/sia.4997

The following have contributed to this page: Dr Erica Iacob