Study of interfaces between phase-change material Ge2Sb2Te5 and prevalent complementary metal-oxide semiconductor materials by XPS

  • XPS study of interfaces between Ge2Sb2Te5 and CMOS materials
  • Jisheng Pan, Lina Wei-Wei Fang, Zheng Zhang, Yee-Chia Yeo
  • Surface and Interface Analysis, February 2012, Wiley
  • DOI: 10.1002/sia.4881

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http://dx.doi.org/10.1002/sia.4881

The following have contributed to this page: Dr Jisheng Pan