Microanalysis of the Ti/Al and Ti/Al/Mo/Au ohmic contacts metallization to AlGaN/GaN heterostructures

  • Ti/Al and Ti/Al/Mo/Au ohmic contacts metallization
  • Wojciech Macherzyński, Andrzej Stafiniak, Bogdan Paszkiewicz, Jacek Gryglewicz, Regina Paszkiewicz
  • physica status solidi (a), February 2016, Wiley
  • DOI: 10.1002/pssa.201532684

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http://dx.doi.org/10.1002/pssa.201532684

The following have contributed to this page: Dr Andrzej Stafiniak