Etching-back of uniaxially strained silicon on insulator investigated by spectroscopic ellipsometry

C. Himcinschi, R. Singh, O. Moutanabbir, R. Scholz, M. Reiche, S. H. Christiansen, U. Gösele, D. R. T. Zahn
  • physica status solidi (a), April 2008, Wiley
  • DOI: 10.1002/pssa.200777753
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The following have contributed to this page: Professor Dietrich RT Zahn