Etching-back of uniaxially strained silicon on insulator investigated by spectroscopic ellipsometry

C. Himcinschi, R. Singh, O. Moutanabbir, R. Scholz, M. Reiche, S. H. Christiansen, U. Gösele, D. R. T. Zahn
  • physica status solidi (a), April 2008, Wiley
  • DOI: 10.1002/pssa.200777753

The authors haven't finished explaining this publication. If you are the author, sign in to claim or explain your work.

Read Publication

http://dx.doi.org/10.1002/pssa.200777753

The following have contributed to this page: Professor Dietrich RT Zahn