Properties of TiOx coatings prepared by dc magnetron sputtering

S. H. Mohamed, O. Kappertz, T. P. Leervad Pedersen, R. Drese, M. Wuttig
  • physica status solidi (a), July 2003, Wiley
  • DOI: 10.1002/pssa.200306597
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http://dx.doi.org/10.1002/pssa.200306597

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