Skin Layer Defects in Si by Optimized Treatment in Hydrogen RF Plasma

  • Corneliu Ghica, Leona Cristina Nistor, Sorin Vizireanu, Gheorghe Dinescu, Antoniu Moldovan, Maria Dinescu
  • Plasma Processes and Polymers, October 2010, Wiley
  • DOI: 10.1002/ppap.201000066

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http://dx.doi.org/10.1002/ppap.201000066

The following have contributed to this page: Professor Gheorghe Dinescu