Thin Film Deposition in Capacitively Coupled Plasmas Fed with Bis(dimethylamino)dimethylsilane and Oxygen: An FTIR study

Rosa Di Mundo, Fabio Palumbo, Francesco Fracassi, Riccardo d'Agostino
  • Plasma Processes and Polymers, August 2009, Wiley
  • DOI: 10.1002/ppap.200800206

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