Adaptive Optics Integrated Surface Roughness Measurement of Sputtered PT Film on Silicon Substrate

  • Yiin Kuen Fuh, Chia He Wang
  • Microwave and Optical Technology Letters, June 2013, Wiley
  • DOI: 10.1002/mop.27790

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http://dx.doi.org/10.1002/mop.27790

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