A General Approach to Semimetallic, Ultra-High-Resolution, Electron-Beam Resists

Bao-Yu Zong, Gu-Chang Han, Yuan-Kai Zheng, Li-Hua An, Tie Liu, Ke-Bin Li, Jin-Jun Qiu, Zai-Bing Guo, Ping Luo, Hao-Min Wang, Bo Liu
  • Advanced Functional Materials, May 2009, Wiley
  • DOI: 10.1002/adfm.200800939

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http://dx.doi.org/10.1002/adfm.200800939

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