All Stories

  1. Model improvements to simulate charging in scanning electron microscope

    Article • Journal of Micro/Nanolithography MEMS and MOEMS, December 2019, SPIE

    Kerim Arat

  2. Electron beam lithography on curved or tilted surfaces: Simulations and experiments

    Article • Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena, September 2019, American Vacuum Society

    Kerim Arat

  3. Charge-induced pattern displacement in E-beam lithography

    Article • Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena, September 2019, American Vacuum Society

    Kerim Arat

  4. Estimating Step Heights from Top-Down SEM Images

    Article • Microscopy and Microanalysis, May 2019, Cambridge University Press

    Kerim Arat

  5. Model improvements to simulate charging in SEM

    Article • March 2018, SPIE

    Kerim Arat

  6. Electric fields in Scanning Electron Microscopy simulations

    Article • April 2016, SPIE

    Kerim Arat