Current affiliation: Danmarks Tekniske UniversitetSubject: PhysicsPrimary location: Denmark
Published in:Journal of Micromechanics and MicroengineeringPublication date:2014-10-29
Published in:ElectrophoresisPublication date:2013-10-07
Published in:Measurement Science and TechnologyPublication date:2015-07-16
Optical methods for measurements of surface roughness become increasingly popular. In this report, three optical methods are compared, and the con...
Published in:Microelectronic EngineeringPublication date:2011-08-01