All Stories

  1. Electron heating via self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas

    Article • Plasma Sources Science and Technology, July 2015, Institute of Physics Publishing

    Dr Edmund Schuengel

  2. Customized ion flux-energy distribution functions in capacitively coupled plasmas by voltage waveform tailoring

    Article • Plasma Sources Science and Technology, July 2015, Institute of Physics Publishing

    Dr Edmund Schuengel

  3. Influence of a phase-locked RF substrate bias on the E- to H-mode transition in an inductively coupled plasma

    Article • Plasma Sources Science and Technology, July 2015, Institute of Physics Publishing

    Dr Edmund Schuengel

  4. Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas

    Article • Plasma Sources Science and Technology, April 2015, Institute of Physics Publishing

    Dr Edmund Schuengel

  5. On the self-excitation mechanisms of plasma series resonance oscillations in single- and multi-frequency capacitive discharges

    Article • Physics of Plasmas, April 2015, American Institute of Physics

    Dr Edmund Schuengel, Dr Zoltan Donko

  6. The effect of the driving frequency on the confinement of beam electrons and plasma density in low-pressure capacitive discharges

    Article • Plasma Sources Science and Technology, March 2015, Institute of Physics Publishing

    Dr Edmund Schuengel, Sebastian Wilczek

  7. Prevention of ion flux lateral inhomogeneities in large area capacitive radio frequency plasmas via the electrical asymmetry effect

    Article • Applied Physics Letters, February 2015, American Institute of Physics

    Dr Edmund Schuengel

  8. Evaluation of the Electrical Asymmetry Effect by spectroscopic measurements of capacitively coupled discharges and silicon thin film depositions

    Article • Thin Solid Films, January 2015, Elsevier

    Dr Edmund Schuengel

  9. The effect of ambipolar electric fields on the electron heating in capacitive RF plasmas

    Article • Plasma Sources Science and Technology, December 2014, Institute of Physics Publishing

    Dr Edmund Schuengel

  10. Ion Distribution Functions in Electrically Asymmetric Capacitively Coupled Radio-Frequency Discharges in Hydrogen

    Article • IEEE Transactions on Plasma Science, October 2014, Institute of Electrical & Electronics Engineers (IEEE)

    Dr Edmund Schuengel

  11. Dust Hour Glass in a Capacitive RF Discharge

    Article • IEEE Transactions on Plasma Science, October 2014, Institute of Electrical & Electronics Engineers (IEEE)

    Dr Edmund Schuengel, Dr Zoltan Donko

  12. Complex Electron Heating in Capacitive Multi-Frequency Plasmas

    Article • IEEE Transactions on Plasma Science, October 2014, Institute of Electrical & Electronics Engineers (IEEE)

    Dr Edmund Schuengel, Dr Zoltan Donko

  13. Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms

    Article • May 2014, Institute of Electrical & Electronics Engineers (IEEE)

    Dr Edmund Schuengel

  14. The influence of the secondary electron induced asymmetry on the Electrical Asymmetry Effect in capacitively coupled plasmas

    Article • May 2014, Institute of Electrical & Electronics Engineers (IEEE)

    Dr Edmund Schuengel

  15. The effect of structured electrodes on heating and plasma uniformity in capacitive discharges

    Article • May 2014, Institute of Electrical & Electronics Engineers (IEEE)

    Dr Edmund Schuengel

  16. Ion flux uniformity in large area capacitively coupled dual-frequency discharges

    Article • May 2014, Institute of Electrical & Electronics Engineers (IEEE)

    Dr Edmund Schuengel

  17. Deposition of crystalline silicon thin films in electrically asymmetric capacitively coupled plasmas

    Article • May 2014, Institute of Electrical & Electronics Engineers (IEEE)

    Dr Edmund Schuengel

  18. Electron heating, mode transitions, and asymmetry effects in dusty single- and dual-frequency capacitive discharges

    Article • May 2014, Institute of Electrical & Electronics Engineers (IEEE)

    Dr Edmund Schuengel

  19. Kinetic simulation of mode transitions and hysteresis effects in low pressure capacitive discharges

    Article • May 2014, Institute of Electrical & Electronics Engineers (IEEE)

    Dr Edmund Schuengel

  20. Electron heating modes and frequency coupling effects in dual-frequency capacitive CF4 plasmas

    Article • Open Chemistry, January 2014, De Gruyter

    Dr Edmund Schuengel, Dr Zoltan Donko

  21. Ion distribution functions at the electrodes of capacitively coupled high-pressure hydrogen discharges

    Article • Plasma Sources Science and Technology, December 2013, Institute of Physics Publishing

    Dr Edmund Schuengel

  22. Effect of structured electrodes on heating and plasma uniformity in capacitive discharges

    Article • Journal of Physics D Applied Physics, November 2013, Institute of Physics Publishing

    Dr Edmund Schuengel

  23. Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms

    Article • Plasma Sources Science and Technology, November 2013, Institute of Physics Publishing

    Dr Edmund Schuengel, Dr Zoltan Donko

  24. Field reversals in electrically asymmetric capacitively coupled radio-frequency discharges in hydrogen

    Article • Journal of Physics D Applied Physics, October 2013, Institute of Physics Publishing

    Dr Edmund Schuengel

  25. Transport control of dust particles via the electrical asymmetry effect: experiment, simulation and modelling

    Article • Journal of Physics D Applied Physics, June 2013, Institute of Physics Publishing

    Dr Edmund Schuengel, Dr Zoltan Donko

  26. The effect of dust on electron heating and dc self-bias in hydrogen diluted silane discharges

    Article • Journal of Physics D Applied Physics, April 2013, Institute of Physics Publishing

    Dr Edmund Schuengel

  27. Deposition of microcrystalline intrinsic silicon by the Electrical Asymmetry Effect technique

    Article • Vacuum, January 2013, Elsevier

    Dr Edmund Schuengel

  28. Fundamental investigations of capacitive radio frequency plasmas: simulations and experiments

    Article • Plasma Physics and Controlled Fusion, November 2012, Institute of Physics Publishing

    Dr Edmund Schuengel, Dr Zoltan Donko

  29. Sheath-to-sheath transport of dust particles in a capacitively coupled discharge

    Article • Plasma Sources Science and Technology, April 2012, Institute of Physics Publishing

    Dr Edmund Schuengel, Dr Zoltan Donko

  30. Possibilities of determining non-Maxwellian EEDFs from the OES line-ratios in low-pressure capacitive and inductive plasmas containing argon and krypton

    Article • Plasma Sources Science and Technology, April 2012, Institute of Physics Publishing

    Dr Edmund Schuengel

  31. Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect

    Article • Journal of Physics D Applied Physics, June 2011, Institute of Physics Publishing

    Dr Edmund Schuengel

  32. Secondary electrons in dual-frequency capacitive radio frequency discharges

    Article • Plasma Sources Science and Technology, May 2011, Institute of Physics Publishing

    Dr Edmund Schuengel, Dr Zoltan Donko

  33. The electrical asymmetry effect in capacitively coupled radio-frequency discharges

    Article • Plasma Sources Science and Technology, April 2011, Institute of Physics Publishing

    Dr Edmund Schuengel, Dr Zoltan Donko

  34. The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges

    Article • Plasma Sources Science and Technology, January 2011, Institute of Physics Publishing

    Dr Edmund Schuengel, Dr Zoltan Donko

  35. Excitation dynamics in electrically asymmetric capacitively coupled radio frequency discharges: experiment, simulation, and model

    Article • Plasma Sources Science and Technology, July 2010, Institute of Physics Publishing

    Dr Edmund Schuengel

  36. Charge dynamics in capacitively coupled radio frequency discharges

    Article • Journal of Physics D Applied Physics, May 2010, Institute of Physics Publishing

    Dr Edmund Schuengel, Dr Zoltan Donko

  37. Phase resolved optical emission spectroscopy: a non-intrusive diagnostic to study electron dynamics in capacitive radio frequency discharges

    Article • Journal of Physics D Applied Physics, March 2010, Institute of Physics Publishing

    Dr Edmund Schuengel

  38. The electrical asymmetry effect in capacitively coupled radio frequency discharges – measurements of dc self bias, ion energy and ion flux

    Article • Journal of Physics D Applied Physics, April 2009, Institute of Physics Publishing

    Dr Edmund Schuengel