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  1. Role of a cyclopentadienyl ligand in a heteroleptic alkoxide precursor in atomic layer deposition
  2. Layer-modulated synthesis of uniform tungsten disulfide nanosheet using gas-phase precursors
  3. In situ surface cleaning on a Ge substrate using TMA and MgCp2for HfO2-based gate oxides
  4. Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process