All Stories

  1. Compact fiber-coupled three degree-of-freedom displacement interferometry for nanopositioning stage calibration

    Article • Measurement Science and Technology, June 2014, Institute of Physics Publishing

    Steven Gillmer

  2. Focused beam scatterometry for deep subwavelength metrology

    Article • March 2014, SPIE

    Steven Gillmer

  3. Amplitude, phase, and polarization control with a single spatial light modulator

    Article • March 2014, SPIE

    Steven Gillmer

  4. Design considerations in a novel fiber-coupled three degree-of-freedom displacement interferometer

    Article • September 2013, SPIE

    Steven Gillmer