All Stories

  1. Depth Profiling of Ion-Implanted 4H–SiC Using Confocal Raman Spectroscopy

    Article • Crystals, February 2020, MDPI AG

    Dr. Mathias Rommel

  2. Raman Characterization of Carrier Concentrations of Al-implanted 4H-SiC with Low Carrier Concentration by Photo-Generated Carrier Effect

    Article • Crystals, August 2019, MDPI AG

    Dr. Mathias Rommel

  3. Deeper insight into lifetime-engineering in 4H-SiC by ion implantation

    Article • Journal of Applied Physics, July 2019, American Institute of Physics

    Dr. Mathias Rommel, Jochen Friedrich

  4. Decoration of Al Implantation Profiles in 4H-SiC by Bevel Grinding and Dry Oxidation

    Article • Materials Science Forum, July 2019, Trans Tech Publications

    Dr. Mathias Rommel

  5. Determination of Compensation Ratios of Al-Implanted 4H-SiC by TCAD Modelling of TLM Measurements

    Article • Materials Science Forum, July 2019, Trans Tech Publications

    Dr. Mathias Rommel

  6. Raman Spectroscopy Characterization of Ion Implanted 4H-SiC

    Article • Materials Science Forum, July 2019, Trans Tech Publications

    Dr. Mathias Rommel

  7. Large-Area Layer Counting of Two-Dimensional Materials Evaluating the Wavelength Shift in Visible-Reflectance Spectroscopy

    Article • The Journal of Physical Chemistry C, March 2019, American Chemical Society (ACS)

    Dr. Mathias Rommel

  8. Laser Surface Microstructuring of a Bio-Resorbable Polymer to Anchor Stem Cells, Control Adipocyte Morphology, and Promote Osteogenesis

    Article • Polymers, December 2018, MDPI AG

    Dr. Mathias Rommel

  9. Normalized differential conductance to study current conduction mechanisms in MOS structures

    Article • Microelectronics Reliability, December 2018, Elsevier

    Dr. Mathias Rommel

  10. One-step nanoimprinted Bragg grating sensor based on hybrid polymers

    Article • Sensors and Actuators A Physical, September 2018, Elsevier

    Dr. Mathias Rommel

  11. Investigation of Ga ion implantation-induced damage in single-crystal 6H-SiC

    Article • Journal of Micromanufacturing, August 2018, SAGE Publications

    Dr. Mathias Rommel

  12. Topic Review: Application of Raman Spectroscopy Characterization in Micro/Nano-Machining

    Article • Micromachines, July 2018, MDPI AG

    Dr. Mathias Rommel

  13. Influence and Mutual Interaction of Process Parameters on the Z1/2 Defect Concentration during Epitaxy of 4H-SiC

    Article • Materials Science Forum, June 2018, Trans Tech Publications

    Dr. Mathias Rommel, Jochen Friedrich

  14. Influence of Al Doping Concentration and Annealing Parameters on TiAl Based Ohmic Contacts on 4H-SiC

    Article • Materials Science Forum, June 2018, Trans Tech Publications

    Dr. Mathias Rommel

  15. Influence of Triangular Defects on the Electrical Characteristics of 4H-SiC Devices

    Article • Materials Science Forum, June 2018, Trans Tech Publications

    Dr. Mathias Rommel

  16. Flexible thin film bending sensor based on Bragg gratings in hybrid polymers

    Article • May 2018, SPIE

    Dr. Mathias Rommel

  17. Nano- and Micro-Patterned S-, H-, and X-PDMS for Cell-Based Applications: Comparison of Wettability, Roughness, and Cell-Derived Parameters

    Article • Frontiers in Bioengineering and Biotechnology, May 2018, Frontiers

    Dr. Mathias Rommel

  18. Detailed characterisation of focused ion beam induced lateral damage on silicon carbide samples by electrical scanning probe microscopy and transmission electron microscopy

    Article • Journal of Applied Physics, March 2018, American Institute of Physics

    Dr. Mathias Rommel

  19. Novel approach based on continuous trench modelling to predict focused ion beam prepared freeform surfaces

    Article • Journal of Materials Processing Technology, February 2018, Elsevier

    Dr. Mathias Rommel

  20. TiO2 surface functionalization of COC based planar waveguide Bragg gratings for refractive index sensing

    Article • Journal of Optics, December 2017, Institute of Physics Publishing

    Dr. Mathias Rommel

  21. Bulk lifetime characterization of corona charged silicon wafers with high resistivity by means of microwave detected photoconductivity

    Article • Journal of Applied Physics, December 2017, American Institute of Physics

    Dr. Mathias Rommel

  22. Polymerization related deformations in multilayer soft stamps for nanoimprint

    Article • Journal of Applied Physics, October 2017, American Institute of Physics

    Dr. Mathias Rommel

  23. Waveguide Bragg Gratings in Ormocer®s for Temperature Sensing

    Article • Sensors, October 2017, MDPI AG

    Dr. Mathias Rommel

  24. 4.5 kV SiC Junction Barrier Schottky Diodes with Low Leakage Current and High Forward Current Density

    Article • Materials Science Forum, May 2017, Trans Tech Publications

    Dr. Mathias Rommel, Mr Jonas Buettner

  25. Point Contact Current Voltage Measurements of 4H-SiC Samples with Different Doping Profiles

    Article • Materials Science Forum, May 2017, Trans Tech Publications

    Dr. Mathias Rommel

  26. Complex 3D structures via double imprint of hybrid structures and sacrificial mould techniques

    Article • Microelectronic Engineering, May 2017, Elsevier

    Dr. Mathias Rommel

  27. Fabrication of Bragg grating sensors in UV-NIL structured Ormocer waveguides

    Article • February 2017, SPIE

    Dr. Mathias Rommel

  28. Generalized approach to design multi-layer stacks for enhanced optical detectability of ultrathin layers

    Article • Applied Physics Letters, January 2017, American Institute of Physics

    Dr. Mathias Rommel

  29. Combination of direct laser writing and soft lithography molds for combined nano- and microfabrication

    Article • October 2016, SPIE

    Dr. Mathias Rommel

  30. Waveguide Bragg gratings in Ormocer hybrid polymers

    Article • Optics Express, June 2016, Optical Society of America (OSA)

    Dr. Mathias Rommel

  31. Modelling of Effective Minority Carrier Lifetime in 4H-SiC n-Type Epilayers

    Article • Materials Science Forum, May 2016, Trans Tech Publications

    Dr. Mathias Rommel, Jochen Friedrich

  32. Hybrid polymers processed by substrate conformal imprint lithography for the fabrication of planar Bragg gratings

    Article • Applied Physics A, March 2016, Springer Science + Business Media

    Dr. Mathias Rommel

  33. Comparison of silicon and 4H silicon carbide patterning using focused ion beams

    Article • Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms, December 2015, Elsevier

    Dr. Mathias Rommel

  34. A DLTS study of hydrogen doped czochralski-grown silicon

    Article • Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms, December 2015, Elsevier

    Dr. Mathias Rommel

  35. Metastable Defects in Proton Implanted and Annealed Silicon

    Article • Solid State Phenomena, October 2015, Trans Tech Publications

    Dr. Mathias Rommel

  36. Comparative Spatially Resolved Characterization of a Czochralski-Grown Silicon Crystal by Different Laser-Based Imaging Techniques

    Article • Solid State Phenomena, October 2015, Trans Tech Publications

    Dr. Mathias Rommel

  37. The Efficiency of Hydrogen-Doping as a Function of Implantation Temperature

    Article • Solid State Phenomena, October 2015, Trans Tech Publications

    Dr. Mathias Rommel

  38. Junction formation and current transport mechanisms in hybrid n-Si/PEDOT:PSS solar cells

    Article • Scientific Reports, August 2015, Nature

    Dr. Mathias Rommel

  39. Tailoring the Electrical Properties of HfO 2 MOS-Devices by Aluminum Doping

    Article • ACS Applied Materials & Interfaces, August 2015, American Chemical Society (ACS)

    Dr. Mathias Rommel

  40. Current conduction mechanism of MIS devices using multidimensional minimization system program

    Article • Microelectronics Reliability, June 2015, Elsevier

    Dr. Mathias Rommel

  41. Modelling of the electrochemical etch stop with high reverse bias across pn-junctions

    Article • May 2015, Institute of Electrical & Electronics Engineers (IEEE)

    Dr. Mathias Rommel

  42. Optical polymers with tunable refractive index for nanoimprint technologies

    Article • Nanotechnology, November 2014, Institute of Physics Publishing

    Dr. Mathias Rommel

  43. Inkjetable and photo-curable resists for large-area and high-throughput roll-to-roll nanoimprint lithography

    Article • Journal of Micro/Nanolithography MEMS and MOEMS, October 2014, SPIE

    Dr. Mathias Rommel

  44. DLTS characterization of proton-implanted silicon under varying annealing conditions

    Article • physica status solidi (b), September 2014, Wiley

    Dr. Mathias Rommel

  45. A New Method to Increase the Doping Efficiency of Proton Implantation in a High-Dose Regime

    Article • ECS Transactions, August 2014, The Electrochemical Society

    Dr. Mathias Rommel

  46. Deep-Level Defects in High-Dose Proton Implanted and High-Temperature Annealed Silicon

    Article • ECS Transactions, August 2014, The Electrochemical Society

    Dr. Mathias Rommel

  47. Bioactivation of Plane and Patterned PDMS Thin Films by Wettability Engineering

    Article • BioNanoScience, August 2014, Springer Science + Business Media

    Dr. Mathias Rommel

  48. MeV-proton channeling in crystalline silicon

    Article • June 2014, Institute of Electrical & Electronics Engineers (IEEE)

    Dr. Mathias Rommel

  49. Enabling large area and high throughput roll-to-roll NIL by novel inkjetable and photo-curable NIL resists

    Article • March 2014, SPIE

    Dr. Mathias Rommel

  50. Nanoscale Characterization of TiO 2 Films Grown by Atomic Layer Deposition on RuO 2 Electrodes

    Article • ACS Applied Materials & Interfaces, February 2014, American Chemical Society (ACS)

    Dr. Mathias Rommel

  51. Thickness mapping of high-κ dielectrics at the nanoscale

    Article • Applied Physics Letters, February 2014, American Institute of Physics

    Dr. Mathias Rommel

  52. HCl Assisted Growth of Thick 4H-SiC Epilayers for Bipolar Devices

    Article • Materials Science Forum, February 2014, Trans Tech Publications

    Dr. Mathias Rommel, Jochen Friedrich

  53. Comparison of Carrier Lifetime Measurements and Mapping in 4H SiC Using Time Resolved Photoluminscence and μ-PCD

    Article • Materials Science Forum, February 2014, Trans Tech Publications

    Dr. Mathias Rommel

  54. Processing of silicon nanostructures by Ga+ resistless lithography and reactive ion etching

    Article • Microelectronic Engineering, October 2013, Elsevier

    Dr. Mathias Rommel

  55. Functional epoxy polymer for direct nano-imprinting of micro-optical elements

    Article • Microelectronic Engineering, October 2013, Elsevier

    Dr. Mathias Rommel

  56. Melt depth and time variations during pulsed laser thermal annealing with one and more pulses

    Article • September 2013, Institute of Electrical & Electronics Engineers (IEEE)

    Dr. Mathias Rommel

  57. Bimodal CAFM TDDB distributions in polycrystalline HfO2 gate stacks: The role of the interfacial layer and grain boundaries

    Article • Microelectronic Engineering, September 2013, Elsevier

    Dr. Mathias Rommel

  58. Evaluation of resistless Ga + beam lithography for UV NIL stamp fabrication

    Article • Nanotechnology, August 2013, Institute of Physics Publishing

    Dr. Mathias Rommel

  59. TiO2-Based Metal-Insulator-Metal Structures for Future DRAM Storage Capacitors

    Article • ECS Transactions, March 2013, The Electrochemical Society

    Dr. Mathias Rommel

  60. Influence of parasitic capacitances on conductive AFM I-V measurements and approaches for its reduction

    Article • Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena, January 2013, American Vacuum Society

    Dr. Mathias Rommel

  61. Influence of Epilayer Thickness and Structural Defects on the Minority Carrier Lifetime in 4H-SiC

    Article • Materials Science Forum, January 2013, Trans Tech Publications

    Dr. Mathias Rommel, Jochen Friedrich

  62. Accuracy of wafer level alignment with substrate conformal imprint lithography

    Article • Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena, January 2013, American Vacuum Society

    Dr. Mathias Rommel

  63. Simple and efficient method to fabricate nano cone arrays by FIB milling demonstrated on planar substrates and on protruded structures

    Article • Microelectronic Engineering, October 2012, Elsevier

    Dr. Mathias Rommel

  64. Novel organic polymer for UV-enhanced substrate conformal imprint lithography

    Article • Microelectronic Engineering, October 2012, Elsevier

    Dr. Mathias Rommel

  65. Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography

    Article • Microelectronic Engineering, October 2012, Elsevier

    Dr. Mathias Rommel

  66. Characterization of grain boundaries in multicrystalline silicon with high lateral resolution using conductive atomic force microscopy

    Article • Journal of Applied Physics, August 2012, American Institute of Physics

    Dr. Mathias Rommel

  67. All electrochemical layer deposition for crystalline silicon solar cell manufacturing: Experiments and interpretation

    Article • Solar Energy, January 2012, Elsevier

    Dr. Mathias Rommel

  68. Light confinement by structured metal tips for antenna-based scanning near-field optical microscopy

    Article • September 2011, SPIE

    Dr. Mathias Rommel

  69. A highly sensitive evaluation method for the determination of different current conduction mechanisms through dielectric layers

    Article • Journal of Applied Physics, September 2011, American Institute of Physics

    Dr. Mathias Rommel

  70. Manufacturing, characterization, and application of nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy

    Article • Microelectronic Engineering, August 2011, Elsevier

    Dr. Mathias Rommel

  71. Gate oxide reliability at the nanoscale evaluated by combining conductive atomic force microscopy and constant voltage stress

    Article • January 2011, American Vacuum Society

    Dr. Mathias Rommel

  72. Electrical Characterization of Nanostructured p-Silicon Electrodes for Bioimpedance Measurements on Single Cell Level

    Article • January 2011, Springer Science + Business Media

    Dr. Mathias Rommel

  73. Current Voltage Characteristics through Grains and Grain Boundaries of High-k Dielectric Thin Films Measured by Tunneling Atomic Force Microscopy

    Article • January 2011, American Institute of Physics

    Dr. Mathias Rommel

  74. Characterization of thickness variations of thin dielectric layers at the nanoscale using scanning capacitance microscopy

    Article • January 2011, American Vacuum Society

    Dr. Mathias Rommel

  75. Simulation of focused ion beam etching by coupling a topography simulator and a Monte-Carlo sputtering yield simulator

    Article • Microelectronic Engineering, May 2010, Elsevier

    Dr. Mathias Rommel

  76. Influence of FIB patterning strategies on the shape of 3D structures: Comparison of experiments with simulations

    Article • Microelectronic Engineering, May 2010, Elsevier

    Dr. Mathias Rommel

  77. Guided phase separation of polymer blend thin films on ion beam-induced pre-patterned substrates

    Article • Microelectronic Engineering, May 2010, Elsevier

    Dr. Mathias Rommel

  78. Full wafer microlens replication by UV imprint lithography

    Article • Microelectronic Engineering, May 2010, Elsevier

    Dr. Mathias Rommel

  79. Fabrication of metallic SPM tips by combining UV nanoimprint lithography and focused ion beam processing

    Article • Microelectronic Engineering, May 2010, Elsevier

    Dr. Mathias Rommel

  80. (Invited) Electrical Scanning Probe Microscopy Techniques for the Detailed Characterization of High-k Dielectric Layers

    Article • January 2010, The Electrochemical Society

    Dr. Mathias Rommel

  81. Comprehensive study of focused ion beam induced lateral damage in silicon by scanning probe microscopy techniques

    Article • January 2010, American Vacuum Society

    Dr. Mathias Rommel

  82. Comparative study between conventional macroscopic IV techniques and advanced AFM based methods for electrical characterization of dielectrics at the nanoscale

    Article • Microelectronic Engineering, July 2009, Elsevier

    Dr. Mathias Rommel

  83. UV nanoimprint lithography process optimization for electron device manufacturing on nanosized scale

    Article • Microelectronic Engineering, April 2009, Elsevier

    Dr. Mathias Rommel

  84. Experimental observation of FIB induced lateral damage on silicon samples

    Article • Microelectronic Engineering, April 2009, Elsevier

    Dr. Mathias Rommel

  85. Correlation of microscopic and macroscopic electrical characteristics of high-k ZrSi[sub x]O[sub 2−x] thin films using tunneling atomic force microscopy

    Article • January 2009, American Vacuum Society

    Dr. Mathias Rommel

  86. Improved insight in charge trapping of high-k ZrO2/SiO2 stacks by use of tunneling atomic force microscopy

    Article • Journal of Applied Physics, July 2008, American Institute of Physics

    Dr. Mathias Rommel

  87. Tunneling atomic-force microscopy as a highly sensitive mapping tool for the characterization of film morphology in thin high-k dielectrics

    Article • Applied Physics Letters, June 2008, American Institute of Physics

    Dr. Mathias Rommel

  88. Recent improvements in the integration of field emitters into scanning probe microscopy sensors

    Article • Microelectronic Engineering, May 2008, Elsevier

    Dr. Mathias Rommel

  89. Custom-specific UV nanoimprint templates and life-time of antisticking layers

    Article • Microelectronic Engineering, May 2008, Elsevier

    Dr. Mathias Rommel

  90. SSRM characterisation of FIB induced damage in silicon

    Article • Journal of Physics Conference Series, March 2008, Institute of Physics Publishing

    Dr. Mathias Rommel

  91. Detailed Carrier Lifetime Analysis of Iron-Contaminated Boron-Doped Silicon by Comparison of Simulation and Measurement

    Article • Journal of The Electrochemical Society, January 2008, The Electrochemical Society

    Dr. Mathias Rommel

  92. Accurate parameter extraction for the simulation of direct structuring by ion beams

    Article • Microelectronic Engineering, May 2007, Elsevier

    Dr. Mathias Rommel

  93. Quantitative oxide charge determination by photocurrent analysis

    Article • Microelectronics Reliability, April 2007, Elsevier

    Dr. Mathias Rommel

  94. UV nanoimprint materials: Surface energies, residual layers, and imprint quality

    Article • January 2007, American Vacuum Society

    Dr. Mathias Rommel

  95. Detailed Photocurrent Analysis of Iron Contaminated Boron Doped Silicon by Comparison of Simulation and Measurement

    Article • January 2007, The Electrochemical Society

    Dr. Mathias Rommel

  96. Characterization of interface state densitiesby photocurrent analysis: comparison of results for different insulator layers

    Article • Microelectronic Engineering, June 2005, Elsevier

    Dr. Mathias Rommel

  97. Some aspects of the high-temperature behavior of bismuth, strontium and barium on silicon surfaces studied by total reflection X-ray fluorescence spectrometry

    Article • Spectrochimica Acta Part B Atomic Spectroscopy, November 2001, Elsevier

    Dr. Mathias Rommel

  98. The influence of the measurement environment on the accuracy of the extraction of the physical parameters of solar cells

    Article • Measurement Science and Technology, August 1999, Institute of Physics Publishing

    Dr. Mathias Rommel, Professor Ralph Gottschalg