All Stories

  1. Optimization of Post Etch Cobalt Compatible Clean by pH and Oxidizer

    Article • Solid State Phenomena, August 2018, Trans Tech Publications

    Akihisa Iwasaki

  2. Rapid Recovery Process of Plasma Damaged Porous Low-k Dielectrics by Wet Surface Modifying Treatment

    Article • Solid State Phenomena, September 2016, Trans Tech Publications

    Akihisa Iwasaki

  3. Industrial Challenges of TiN Hard Mask Wet Removal Process for 14nm Technology Node

    Article • Solid State Phenomena, September 2014, Trans Tech Publications

    Akihisa Iwasaki