All Stories

  1. Influence of thermionic emission on the current–voltage characteristics of a hot target magnetron

    Article • Journal of Applied Physics, May 2025, American Institute of Physics

    Viktor I. Shapovalov

  2. Basic principles of modeling reactive sputtering

    Article • Journal of Applied Physics, April 2024, American Institute of Physics

    Viktor I. Shapovalov

  3. Physicochemical model of reactive sputtering

    Article • Journal of Applied Physics, February 2023, American Institute of Physics

    Viktor I. Shapovalov, Dr. Viktor I. Shapovalov