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  1. Oxidation state of cobalt oxide in thermal-cyclic atomic layer etching of cobalt by plasma oxidation and organometallization

    Article • AIP Advances, April 2024, American Institute of Physics

    Sumiko Fujisaki

  2. Thermal-cyclic atomic layer etching of cobalt with smooth etched surface by plasma oxidation and organometallization

    Article • Applied Physics Letters, September 2022, American Institute of Physics

    Sumiko Fujisaki