All Stories

  1. Impact of VUV photons on SiO2 and organosilicate low-k dielectrics: General behavior, practical applications, and atomic models
  2. Detection of surface electronic defect states in low and high-k dielectrics using reflection electron energy loss spectroscopy
  3. Research Updates: The three M's (materials, metrology, and modeling) together pave the path to future nanoelectronic technologies
  4. Detection of defect states in low-k dielectrics using reflection electron energy loss spectroscopy
  5. Validation of a correction procedure for removing the optical effects from transmission spectra of thin films on substrates
  6. Valence band offset at the amorphous hydrogenated boron nitride-silicon (100) interface
  7. A method to extract absorption coefficient of thin films from transmission spectra of the films on thick substrates