All Stories

  1. On-machine separation and compensation of target mirror’s surface shape errors in multidimensional interferometric measurement system
  2. Design and experiment of multidimensional and subnanometer stage driven by spatially distributed piezoelectric ceramics
  3. Development of submicron precision three-dimensional low cross-interference air-floating motion stage
  4. Large-scale and high-depth three dimensional scanning measurement system and algorithm optimization
  5. A simple asymptotic search method for estimation of minimum zone sphericity error
  6. Independent driving method for significant hysteresis reduction of piezoelectric stack actuators
  7. A method to correct hysteresis of scanning probe microscope images based on a sinusoidal model
  8. Thermal Stability Analysis and Optimal Design for a Two-Dimensional Angle Sensor
  9. The Analysis and Design of a Large Stroke with High-Precision Polarized Laser Interferometer System
  10. Flexural sensitivity of high resonant atomic force microscopy cantilever based on optical lever detection