All Stories

  1. Development of submicron precision three-dimensional low cross-interference air-floating motion stage
  2. Large-scale and high-depth three dimensional scanning measurement system and algorithm optimization
  3. A simple asymptotic search method for estimation of minimum zone sphericity error
  4. Independent driving method for significant hysteresis reduction of piezoelectric stack actuators
  5. A method to correct hysteresis of scanning probe microscope images based on a sinusoidal model
  6. Thermal Stability Analysis and Optimal Design for a Two-Dimensional Angle Sensor
  7. The Analysis and Design of a Large Stroke with High-Precision Polarized Laser Interferometer System
  8. Flexural sensitivity of high resonant atomic force microscopy cantilever based on optical lever detection