All Stories

  1. Accelerating Discovery of Solid‐State Thin‐Film Metal Dealloying for 3D Nanoarchitecture Materials Design through Laser Thermal Gradient Treatment (Small 35/2025)
  2. Inspection of next-generation EUV resists with nano-projectile secondary ion mass spectrometry
  3. Impact of Zn-based inorganic-organic hybrid thin film structure on patterning performance for dry EUV resist applications
  4. In-situ investigation of as-cast homopolymer-based resists
  5. Inspection of next generation hybrid EUV resists with NP-SIMS
  6. A comprehensive analysis of low-energy electron exposure on ALD-synthesized inorganic-organic hybrid resist thin films for dry EUV resist platform
  7. High-sensitivity positive-tone hybrid EUV resist synthesized by vapor phase metal-oxide infiltration
  8. Modeling photoacid diffusion in chemically amplified resists via proximity effect correction in electron beam lithography
  9. Vapor-phase metal infiltration for inorganic-organic hybrid extreme ultraviolet lithography resists
  10. Accelerating Discovery of Solid‐State Thin‐Film Metal Dealloying for 3D Nanoarchitecture Materials Design through Laser Thermal Gradient Treatment
  11. Macroscale-area patterning of three-dimensional DNA-programmable frameworks
  12. Scalable fabrication of Chip-integrated 3D-nanostructured electronic devices via DNA-programmable assembly
  13. In Situ Analysis of Electron-Induced Chemical Transformations in Vapor-Phase-Synthesized Al-Based Inorganic–Organic Hybrid Thin Films for EUV Resist Platform
  14. Electron-induced chemical transformation of vapor-phase synthesized hybrid resist materials for EUV and beyond EUV lithography
  15. Inspection of next generation EUV resists with nano-projectile SIMS
  16. Approaching Angstrom-Scale Resolution in Lithography Using Low-Molecular-Mass Resists (<500 Da)
  17. Understanding the stability of advanced inorganic-organic hybrid thin films for advanced resist applications
  18. Three-dimensional nanoscale metal, metal oxide, and semiconductor frameworks through DNA-programmable assembly and templating
  19. Effects of alumina priming on the electrical properties of ZnO nanostructures derived from vapor-phase infiltration into self-assembled block copolymer thin films
  20. Mitigating challenges in aberration-corrected electron-beam lithography on electron-opaque substrates
  21. Vapor‐Phase Infiltrated Organic–Inorganic Positive‐Tone Hybrid Photoresist for Extreme UV Lithography
  22. Atomic layer deposition and its derivatives for extreme ultraviolet (EUV) photoresist applications
  23. Bottom-up synthesis of mesoscale nanomeshes of graphene nanoribbons on germanium
  24. Unraveling the ultrahigh modulus of resilience of Core-Shell SU-8 nanocomposite nanopillars fabricated by vapor-phase infiltration
  25. Charge transport in mixed metal halide perovskite semiconductors
  26. Responsive blends of block copolymers stabilize the hexagonally perforated lamellae morphology
  27. Chemical reactions induced by low-energy electron exposure on a novel inorganic-organic hybrid dry EUV photoresist deposited by molecular atomic layer deposition (MALD)
  28. Priming self-assembly pathways by stacking block copolymers
  29. EUVL characteristics of indium-oxide-infiltrated PMMA hybrid photoresist synthesized by vapor-phase infiltration
  30. Low-energy electron exposure and reactive ion etching characteristics of hybrid EUV photoresist synthesized by molecular atomic layer deposition
  31. Reduced Stochastic Resistive Switching in Organic‐Inorganic Hybrid Memristors by Vapor‐Phase Infiltration (Adv. Electron. Mater. 7/2022)
  32. Review of metal-containing resists in electron beam lithography: perspectives for extreme ultraviolet patterning
  33. Reduced Stochastic Resistive Switching in Organic‐Inorganic Hybrid Memristors by Vapor‐Phase Infiltration
  34. Unraveling the Ultrahigh Modulus of Resilience of Core-Shell SU-8 Nanocomposite Nanopillars Fabricated by Vapor-Phase Infiltration
  35. Templating Functional Materials Using Self-Assembled Block Copolymer Thin-Film for Nanodevices
  36. Effects of polymer grain boundary passivation on organic–inorganic hybrid perovskite field-effect transistors
  37. Photochemical study of metal infiltrated e-beam resist using vapor-phase infiltration for EUV applications
  38. Quantum-Well Bound States in Graphene Heterostructure Interfaces
  39. Hybrid resist synthesis by ex-situ vapor-phase infiltration of metal oxides into conventional organic resists
  40. Solution‐Processed High‐Performance ZnO Nano‐FETs Fabricated with Direct‐Write Electron‐Beam‐Lithography‐Based Top‐Down Route
  41. Large mobility modulation in ultrathin amorphous titanium oxide transistors
  42. Resolving Triblock Terpolymer Morphologies by Vapor-Phase Infiltration
  43. Infiltration synthesis of hybrid nanocomposite resists for advanced nanolithography
  44. Enhanced Hybridization and Nanopatterning via Heated Liquid-Phase Infiltration into Self-Assembled Block Copolymer Thin Films
  45. Optimization of Transistor Characteristics and Charge Transport in Solution Processed ZnO Thin Films Grown from Zinc Neodecanoate
  46. Advancing next generation nanolithography with infiltration synthesis of hybrid nanocomposite resists
  47. Core–Shell Electrospun Polycrystalline ZnO Nanofibers for Ultra-Sensitive NO2 Gas Sensing
  48. Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition
  49. Author Correction: Nanofabrication of Conductive Metallic Structures on Elastomeric Materials
  50. Nanofabrication of Conductive Metallic Structures on Elastomeric Materials
  51. Zinc oxide nanowire gas sensors: fabrication, functionalisation and devices