All Stories

  1. Impact of plasma reactive ion etching on low dielectric constant porous organosilicate films' microstructure and chemical composition

    Article • Microporous and Mesoporous Materials, July 2016, Elsevier

    Dr Matthieu J Lepinay

  2. Probing the microporosity of low-k organosilica films: MP and t-plot methods applied to ellipsometric porosimetry data

    Article • Microporous and Mesoporous Materials, November 2015, Elsevier

    Dr Matthieu J Lepinay

  3. Contribution of molecular simulation to the characterization of porous low-k materials

    Article • May 2015, Institute of Electrical & Electronics Engineers (IEEE)

    Dr Matthieu J Lepinay

  4. Predicting Adsorption on Bare and Modified Silica Surfaces

    Article • The Journal of Physical Chemistry C, March 2015, American Chemical Society (ACS)

    Dr Matthieu J Lepinay

  5. ToF-SIMS spectra multivariate analyses for the chemical characterization of microelectronic low-k materials

    Article • Surface and Interface Analysis, May 2014, Wiley

    Dr Matthieu J Lepinay

  6. Depth-resolved impact of integration process on porosity and solvent diffusion in a SiOCH low-k material

    Article • Journal of Porous Materials, March 2014, Springer Science + Business Media

    Dr Matthieu J Lepinay

  7. Surface Modification and Fabrication of Li-Ion Battery Components for Plug-In Hybrid Electric Vehicle

    Article • January 2010, The Electrochemical Society

    Dr Matthieu J Lepinay