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  1. Pressure Microsensor based on DLC Thin Films
  2. Study on the Correlation between Film Composition and Piezoresistive Properties of PECVD SixCy Thin Films
  3. An overview on the modeling of silicon piezoresistive pressure microsensors
  4. Effects of the Substrate on Piezoresistive Properties of Silicon Carbide Thin Films
  5. Fabrication and characterization of a