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  1. Statistics of EUV exposed nanopatterns: Photons to molecular dissolutions

    Article • Journal of Applied Physics, May 2025, American Institute of Physics

    Hiroshi Fukuda

  2. Stochastic hotspots in extreme ultraviolet exposed nano-patterns as correlated molecular sub-cluster formation probabilities

    Article • Journal of Applied Physics, June 2023, American Institute of Physics

    Hiroshi Fukuda

  3. Stochasticity in extreme-ultraviolet lithography predicted by principal component analysis of Monte Carlo simulated event distributions in resist films

    Article • Journal of Applied Physics, August 2022, American Institute of Physics

    Hiroshi Fukuda