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  1. Stochastic hotspots in extreme ultraviolet exposed nano-patterns as correlated molecular sub-cluster formation probabilities

    Article • Journal of Applied Physics, June 2023, American Institute of Physics

    Hiroshi Fukuda

  2. Stochasticity in extreme-ultraviolet lithography predicted by principal component analysis of Monte Carlo simulated event distributions in resist films

    Article • Journal of Applied Physics, August 2022, American Institute of Physics

    Hiroshi Fukuda