All Stories

  1. On-chip read-out of picomechanical motion under ambient conditions
  2. Microcantilevers as a platform for the detection of hydrogen
  3. Capturing the impulse response of a second order system
  4. Low temperature through-wafer reactive ion etching for MEMS
  5. An optically resonant position read-out system for MEMS gas sensors
  6. Mercury–Cadmium–Telluride Waveguides – A Novel Strategy for On-Chip Mid-Infrared Sensors
  7. Integrated Resonant Optical Readout Applicable to Large Arrays of MEMS Beams
  8. Demonstration of a method for detecting MEMS suspended beam height
  9. Model and Analysis of a High Sensitivity Resonant Optical Read-Out Approach Suitable for Cantilever Sensor Arrays