All Stories

  1. Identification of electrostatic risks created by using equipotential bonding

    Article • AIMS Electronics and Electrical Engineering, January 2019, American Institute of Mathematical Sciences (AIMS)

    Dr Gavin C Rider

  2. How to protect the photomasks used for semiconductor production from electrostatic damage

    Article • November 2018, SPIE

    Dr Gavin C Rider

  3. Electrostatic risk to reticles in the nanolithography era

    Article • Journal of Micro/Nanolithography MEMS and MOEMS, April 2016, SPIE

    Dr Gavin C Rider

  4. Electrostatic risks to reticles and damage prevention methodology

    Article • March 2016, SPIE

    Dr Gavin C Rider

  5. Data from a special wireless sensor reticle that measures electric field wherever a reticle can go.

    Article • April 2009, SPIE

    Dr Gavin C Rider

  6. Electric field-induced progressive CD degradation in reticles

    Article • October 2008, SPIE

    Dr Gavin C Rider

  7. Experimental quantification of reticle electrostatic damage below the threshold for ESD

    Article • March 2008, SPIE

    Dr Gavin C Rider

  8. VG Ionex

    Article • Vacuum, January 1988, Elsevier

    Dr Gavin C Rider

  9. Bolt-on SIMS system

    Article • Vacuum, October 1986, Elsevier

    Dr Gavin C Rider