All Stories

  1. The statistical uncertainty of the Heydemann correction: a practical limit of optical quadrature homodyne interferometry

    Article • Measurement Science and Technology, July 2015, Institute of Physics Publishing

    Dr Rainer Köning

  2. Challenges in nanometrology: high precision measurement of position and size

    Article • tm - Technisches Messen, January 2015, De Gruyter

    Dr Rainer Köning

  3. Ellipse fitting by nonlinear constraints to demodulate quadrature homodyne interferometer signals and to determine the statistical uncertainty of the interferometric phase

    Article • Measurement Science and Technology, October 2014, Institute of Physics Publishing

    Dr Viktor Witkovsky, Dr Rainer Köning

  4. Ultra-präzise Lageregelung mittels interferometrischer Positionsdetektion und Tauchspulenantrieb

    Article • tm - Technisches Messen, May 2014, De Gruyter

    Dr Rainer Köning

  5. Improved measurement performance of the Physikalisch-Technische Bundesanstalt nanometer comparator by integration of a new Zerodur sample carriage

    Article • Optical Engineering, May 2014, SPIE

    Dr Rainer Köning

  6. The Road towards Accurate Optical Width Measurements at the Industrial Level

    Article • January 2014, Springer Science + Business Media

    Dr Rainer Köning

  7. The road towards accurate optical width measurements at the industrial level

    Article • May 2013, SPIE

    Dr Rainer Köning

  8. Implementing registration measurements on photomasks at the Nanometer Comparator

    Article • Measurement Science and Technology, July 2012, Institute of Physics Publishing

    Dr Rainer Köning

  9. Estimating the standard uncertainty contribution of the straight-line fit algorithm used to determine the position and the width of a graduation line

    Article • Metrologia, January 2012, Institute of Physics Publishing

    Dr Viktor Witkovsky, Dr Rainer Köning

  10. Investigation of the cantilever response of non-contact atomic force microscopy for topography measurements in all three dimensions

    Article • Measurement Science and Technology, August 2011, Institute of Physics Publishing

    Dr Rainer Köning

  11. Dimensionelle Metrologie an ebenen Substraten mit Mikro- und NanostrukturenDimensional Metrology on Plane Substrates with Micro- and Nanostructures

    Article • tm - Technisches Messen, February 2009, De Gruyter

    Dr Rainer Köning

  12. Influence of slant of objective on image formation in optical microscopes

    Article • Chinese Optics Letters, January 2008, Shanghai Institute of Optics and Fine Mechanics

    Dr Rainer Köning

  13. Achievement of sub nanometer reproducibility in line scale measurements with the nanometer comparator

    Article • March 2007, SPIE

    Dr Rainer Köning

  14. Characterizing the performance of the PTB line scale interferometer by measuring photoelectric incremental encoders

    Article • August 2005, SPIE

    Dr Rainer Köning

  15. Recent activities at PTB nanometer comparator

    Article • November 2003, SPIE

    Dr Rainer Köning

  16. Line scale comparison Nano3

    Article • November 2003, SPIE

    Dr Rainer Köning

  17. Final report on CCL-S3 supplementary line scale comparison Nano3

    Article • Metrologia, January 2003, Institute of Physics Publishing

    Dr Rainer Köning

  18. Status of the nanometer comparator at PTB

    Article • October 2001, SPIE

    Dr Rainer Köning

  19. Accurate dimensional metrology with atomic force microscopy

    Article • June 2000, SPIE

    Dr Rainer Köning

  20. Step-height metrology for data storage applications

    Article • November 1999, SPIE

    Dr Rainer Köning

  21. Dimensional metrology with the NIST calibrated atomic force microscope

    Article • June 1999, SPIE

    Dr Rainer Köning

  22. Measurement of pitch and width samples with the NIST calibrated atomic force microscope

    Article • June 1998, SPIE

    Dr Rainer Köning

  23. Nanostrukturen als Testobjekte für die Rastertunnelmikroskopie

    Article • tm - Technisches Messen, December 1994, De Gruyter

    Dr Rainer Köning